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Test Method and Specification for Testing Perfluoroalkoxy (PFA) Materials Used in Liquid Chemical Distribution Systems

Aggressive chemicals such as hydrochloric, hydrofluoric and nitric acid are known to leach metals from polymer piping. PFA with low extraction is critical when manufacturing leading-edge semiconductors. SEMI C90 establishes extraction requirements for PFA material and components used in chemical distribution systems and process tools.

White plastic beads on black background, Polymers bead or polymer resin, polymer pallet, P
Solar Cell Disilane PFA Reagent bottle ultra-Clean PFA bottles for Semiconductors
PFA tubing

Components are extracted for 24 hours in 5% nitric acid. Following exposure, the extract is analyzed for trace metal concentration using Inductively Coupled Plasma – Mass Spectroscopy (ICP/MS).  Using the volume of the extract and surface area of the component under test, an area normalized extraction mass is calculated and compared to the current criteria. Tubing, pipe, valves and most fluid handling components can be evaluated for acid extractables using SEMI C90.

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