Specification for High Purity Polymer Materials and Components Used in Ultrapure Water and Liquid Chemical Distribution Systems
Low trace metal, anion and organic contamination levels in ultrapure water (UPW) are critical for successful semiconductor manufacturing. SEMI F57 establishes extraction requirements for high-purity polymer materials and components.
Materials and components are extracted for 7 days in 85 °C UPW in accordance with SEMI F40 - Practice for Preparing Liquid Chemical Distribution Components and Neat Polymers for Chemical Testing. Tubing, pipe, valves and most fluid handling components can be evaluated for UPW extractables using SEMI F57. Shown here are a set of sample test results for various specimen types.
SEMI F57, in conjunction with SEMI F104 (Test Method for Evaluation of Particle Contribution of Components Used in Ultrapure Water and Liquid Chemical Distribution Systems), establish the material and performance requirements typically required for semiconductor UPW applications.